Positioning, manipulation, processing and measurement of objects and structures with nanometer accuracy
world's most precise nanopositioning and nanometrology machine
measuring and positioning range 25 x 25 x 5 mm
resolution 0.1 nm
highest accuracy 3D positioning and measuring system
probing systems, e.g. laser focus sensors, atomic force microscopes, white light sensors, 3D micro scanners
open device architecture enables application of customized sensors
the NMM-1 is controlled via PC software. User API is available.
The nanopositioning and nanomeasuring machine for three-dimensional coordinate measurement operates in a measuring range of 25 mm x 25 mm x 5 mm with a resolution of 0.1 nm. A special sensor arrangement ensures a measurement free of aberrations in all three coordinate axes. The measuring axes of three miniature interferometers intersect virtually at the point of contact between the probing sensor and the measured object.
The measured object lies directly on a movable mirror corner. The position of the mirror corner is detected by the three fixed miniature interferometers. The mirror corner is positioned with a three-axis drive system. Two angle sensors are used to measure and compensate for angular deviations during positioning.
The light from one stabilized laser is transmitted from the electronics unit to the interferometer heads via optical fibers. This results in a compact and temperature-stable design of the nanopositioning and nanomeasuring machine.
The nanomeasuring machine is the only metrological system in the world that is safely suitable for measurements of macroscopic objects with sub-nanometer accuracy under normal conditions and is in use at several national metrological institutes.
Areas of application
positioning, manipulation, processing and measurement of objects of microelectronics, micromechanics, optics, microsystems technology with nanometer precision in large spatial ranges
continuous AFM scans over large areas are possible
measurement of precision parts, e.g. hardness indenters, membranes and microlenses
calibration of step height standards and pitch standards
Abbe-error-free positioning
metrological measurement setup, suitable for calibration and qualification of sensors in development
open device architecture, use of customer-specific probing sensors is possible
