Vibrometer system for microstructures and MEMS
high-precision, non-contact vibration measurement on micro-objects
easy adjustment and handling
extensive trigger options
X-Y table 50 mm x 50 mm, other options on request
Microscope objective 10x, 20x, 50x
Spot diameter 2 µm - 10 µm, (depending on objective)
OEM use of the vibrometer unit is possible
open interfaces for OEM software under Windows and Linux
FFT software for spectral analysis
The Nano Vibration Analyzer NA is a combination of a fiber-coupled vibrometer of the LSV 120 NG series with an engineering microscope. The system is ideally suited for measuring the dynamic behavior and static deflection of microstructures, MEMS and cantilevers. Depending on the objective used, a measurement spot size of less than 2 µm can be achieved.
The measured object can be positioned and scanned over a wide range using an X-Y stage and can be observed through a camera. The microscope objective is interchangeable and defines both the visible range and the laser spot diameter. The achievable displacement resolution of the laser interferometric vibrometer is in the picometer range, and vibration frequencies up to 5 MHz can be analyzed.
A specially developed software is offered for the acquisition and display of the measurement data. In addition to frequency analysis of the vibration and triggered measurement recording, this software enables control of the X-Y table and an external frequency generator. More extensive measurement sequences can be automated via scripts.
vibration and displacement measurement on microcomponents, MEMS
non-contact vibration measurement on surfaces of any roughness
determination of vibration spectra
determination of vibration modes
determination of natural frequencies on microobjects and macroscopic components
multi-coordinate measurements with multiple systems
Our SIOS experts will be happy to visit you on site. Together we can find a quick solution for your application and carry out the first test measurements in your environment.