Contact

+49 (0) 3677 64 47-0

Office: Mo–Fri: 08:00 a.m.–4:30 p.m. (CET)

further contact options

Request

Sticky

Three measurements. One device. Nanometer precision.

For a personal consultation

Please contact one of our representatives:

Worldwide


SIOS Meßtechnik GmbH
Am Vogelherd 46
98693 Ilmenau / Germany
 

 Rudyard Urtecho

 +49 (0) 3677 64 47-33

 +49 (0) 1520 41 62 081 (mobile)

 rudyard.urtecho@sios.de

 www.sios-precision.com/en/

China


Precision Sensor & Measuring-Control Technology(Tianjin)Co., Ltd.
RM 208, WEST TOWER, NO. 5 BLK, KAIHUA ROAD,
HUAYUAN INDUSTRIES PARK, BINHAI HIGH-TECH AREA
300384 TIANJIN / China

 Tony Sun

+86-13132052604

+86-18526266523 (mobile)

tonysun83219@foxmail.com

precision-sensor.com

Triple beam laser interferometric measuring system for simultaneous and accurate length, pitch and yaw angle measurements

flexible length measuring system of highest accuracy

easy handling and adjustment due to integrated beam direction detection

various optical reflectors can be used, e.g. spherical, plane mirror reflector

permissible tilting of the measuring reflector up to ± 12.5°

compact design

design of the sensor head optionally in aluminum, stainless steel or invar

beam distance: 12 mm

OEM versions, OEM software and vacuum version are possible

beam deflection with an optionally available adjustable deflection mirror

extended range of applications through optional interfaces

extensive trigger options

calibration software according to the currently valid standards

Areas of application

laser interferometric measurements on guides, measuring, microscope and positioning stages

high-precision pitch and yaw angle correction for two- or multi-coordinate measurements

calibration of measuring machines and machine tools

differential measurements (dilatometry, materials testing)

dynamic angle measurements, acquisition of angular oscillations

extension of the measuring range for angle measurement on request

Read application example

Ideal for

quality control 

calibration

development

science / research

OEM applications

Documents for download

Note: Technical parameters may vary for export outside the EU.
Please contact us by email if required: contact@sios.de

Accessories

Triple reflector unit

measurement range until 6 m

angle acceptance ±12.5°

base distance 12 mm

item number A039992

Triple reflector unit long-range

measurement range until 10 m

angle acceptance ±12.5°

base distance 12 mm

item number A041318

Triple reflector unit

fixing parallel with beam direction, lightweight version

measurement range until 6 m

base distance 12 mm

item number A039169

Reflector mount with articulated ball mount

with lateral adjustment option (without reflector unit)

item number A037044

Beam deflection mirror unit 90°

for free positioning

item number A040678

Roll angle measurment sensor

System consists of measuring and reference sensor (2 x RAS 175 W)

measurement range until ±1°

resolution 0.2 arcsec

item number A042869 (with cable)

item number A042868 (with radio)

90°-beam reflection

attachment to sensor head

item number A043949

Wedge plate attachment

2° deflection angle

item number A039178

Are you interested in the SP 5000 TR?

We will be happy to make you a suitable offer.

Fields marked with * are required for processing.

Angebot anfordern engl

Kontaktdaten

By using our contact form, you agree to the processing and storage of your data.

Further information on data protection