Precision metrology

for industry and science

For over 30 years SIOS has been one of the leading companies in precision measurement technology. We offer high quality standard sensors as well as customized OEM solutions for the fields of research & development, calibration, mechanical engineering, optics and semiconductor industry, medical technology, nano metrology and geoscience.

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Made in Germany

SIOS develops and manufactures laser interferometric measurement technology and precision measurement devices for calibration and nano measurement technology for measuring length, angle, vibration, straightness, temperature, force and other measured variables with the highest resolution and low measurement uncertainty.

Scientists, engineers, metrologists, quality inspectors and procurement all over the world trust SIOS precision metrology.

High-precision measurement systems from SIOS at a glance


Find the right SIOS product for your measurement task. SIOS offers solutions from high-precision length measurement and continuous 5 DOF measurement to measurement of nanostructures using laser interferometers, laser vibrometers, probes, nano metrology, stabilized lasers and climate measurement.

Applications: In which areas is SIOS precision measurement technology used?


Learn more about the wide range of possible practical applications of our devices. SIOS measurement technology is applied when precise and reliable measurement, e.g. for machine calibration, quality assurance, surface measurement or measurements in vacuum are required. 

OEM service: Customized precision measurement technology for individual customer requirements


Individually tailored solutions are one of our biggest strengths. Thanks to our many years of experience and high flexibility in addition to the modular design of our measuring systems, we can develop customized solutions for specific customer requirements. Particualrly our customers in the OEM secotor stand to benefit from this. 

International Representation

Proximity to our customers is important to us

Our 22 agencies for 30 countries provide optimal and comprehensive support to our customers. Our sales partners offer communication at eye level, both in terms of technical knowledge and language. They know the local market requirements in addition to cultural norms and practices. Our partners have extensive experience in the field of laser interferometric measurement technology and will find the perfect solution for your individual needs. 

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SIOS honored as Thuringia's world market and technology leader

Highest accuracy in the construction of the nanomeasuring machine

Nanomeasuring machine…

Last week, we could deliver for the first time a nanopositioning and nanomeasuring machine to an industrial company.

Group photo Prof. Dr. Gerd Jäger, Dr. Denis Dontsov, Wolfang Tiefensee Thuringian Minister of Economics, Dr. Daniel Schultheiß, Mayor of Ilmenau

Three reasons to celebrate

30 (+1) years of SIOS, inauguration of our new multifunctional building and being honored as Top 100 Innovator 2022



W3+ Fair 2023

March 29 - March 30, 2023
Interdisciplinary platform for the high-tech industry

3rd WORLD Interferometry DAY

April 19 - April 19, 2023
04/17 International Symposium // 04/19 Action Day in Honor…

Control 2023

May 09 - May 12, 2023
International trade fair for quality assurance