Fiber-coupled, highly linear probe for high-precision tactile thickness measurement and calibration
laser interferometric precision probe for tactile length/thickness measurements
linearity ≤ ±2 nm
measuring force fixed adjustable 0.5 ... 1.5 N
high linearity over the entire measuring range
constant probe measuring force over the entire measuring range
open interfaces for OEM software under Windows and Linux
The LM series laser interferometric probes are precision linear encoders. With these probes, tactile measurements are possible over a measuring range of 20 or 50 mm with nanometer accuracies. The highly linear length gauges are compatible with conventional measuring systems due to their size and the clamping shaft diameter of Ø 8 mm h6.
The integrated laser interferometer converts the measuring movement of the motor-driven measuring spindles into an interference signal. This optical measurement signal is transmitted by fiber optics to the optoelectronic supply and evaluation unit and output as a length value. The stylus quill and the integrated interferometer are adjusted to each other, taking into account the minimization of abbe and alignment errors.
The stable HeNe laser, whose light is fed to the laser interferometer via optical fibers, and the correction of environmental influences on the laser wavelength are the basis for the high measuring accuracy. Operation and display are either via a separate display or via a PC with suitable software.
Our SIOS experts will be happy to visit you on site. Together we can find a quick solution for your application and carry out the first test measurements in your environment.