Four-beam laser interferometric displacement angle difference measuring system
highly stable differential length and pitch angle measurements
perfect for XY stages
beam distances 15 mm (length measurement) and 6 mm (angle measurement)
extremely low temperature sensitivity < 20 nm / K
OEM and vacuum versions of the device are available
The SP 5000 DI/DS interferometer combines the advantages of a differential interferometer with those of a multi-beam interferometer. For the first time, it combines a highly stable length measurement based on the differential principle with a high-resolution interferometric tilt angle measurement. This makes it possible to detect not only the tiniest movements, but also the smallest tilts over larger areas without the results being subject to thermal and physical environmental influences.
The interferometer is designed for use on plan mirrors and as built-in measurement systems. Application with reflectors is possible. The interferometer is adjusted using ultra-stable optical components integrated into the beam path.
You want to know whether the
Displacement angle differential interferometer – SP 5000 DI/DS is the right solution for your measurement tasks?
Our SIOS experts will be happy to visit you on site. Together we can find a quick solution for your application and carry out the first test measurements in your environment.
