Ultra stable compact differential laser interferometer
differential length or angle measurement of highest accuracy
minimization of environmental influences through differential measurement
thermally ultra-stable sensor design, temperature sensitivity < 10 nm/K
various optical reflectors can be used, e.g. spherical, plane mirror reflector
large tilt invariance of the measuring reflector
compact and robust design
sensor head design in stainless steel as standard
Beam distance: 14 mm
OEM versions, OEM software and vacuum version are possible
can be used as a feedback system with optional interfaces
extensive trigger options
The ultra-stable, compact SP 5000 DI/F differential interferometer is designed for applications in which highly stable length measurements must be implemented over long periods of time. The compact sensor design enables long-term stable adjustment and placement even in tight spaces, so that the precision measuring system is ideal as a laser scale for closed control loops. The application requires an external reference point, which is usually placed in the middle of the measuring range in order to achieve optimal measured value stability. The basic principle of the interferometer is based on the SP 5000 DI series and thus also achieves length resolutions in the sub-nanometer range. Measurements over several meters are easily possible, whereby the reflectors of the SP series can be used.
The differential laser interferometer is available as an OEM version for installation as an encoder in machine axes. For measurements in vacuum, the SP 5000 DI/F is available as a vacuum-optimized version.
use as feedback system for closed control loops is possible
The standard beam distance is 14 mm. We offer other beam distances on request.
Our SIOS experts will be happy to visit you on site. Together we can find a quick solution for your application and carry out the first test measurements in your environment.