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Differential Laser Interferometer

SP 5000 DI/F

Ultra stable compact differential laser interferometer 

differential length or angle measurement of highest accuracy

minimization of environmental influences through differential measurement

thermally ultra-stable sensor design, temperature sensitivity < 10 nm/K

various optical reflectors can be used, e.g. spherical, plane mirror reflector

large tilt invariance of the measuring reflector

compact and robust design

sensor head design in stainless steel as standard

Beam distance: 14 mm

OEM versions, OEM software and vacuum version are possible

can be used as a feedback system with optional interfaces

extensive trigger options

The ultra-stable, compact SP 5000 DI/F differential interferometer is designed for applications in which highly stable length measurements must be implemented over long periods of time. The compact sensor design enables long-term stable adjustment and placement even in tight spaces, so that the precision measuring system is ideal as a laser scale for closed control loops. The application requires an external reference point, which is usually placed in the middle of the measuring range in order to achieve optimal measured value stability. The basic principle of the interferometer is based on the SP 5000 DI series and thus also achieves length resolutions in the sub-nanometer range. Measurements over several meters are easily possible, whereby the reflectors of the SP series can be used.

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Technical data

2 m
with plane-mirror
5 m
with reflector


0.1 µm/m

5 pm

±1.5 arcmin
with plane mirror
with reflector


Areas of application

The differential laser interferometer is available as an OEM version for installation as an encoder in machine axes. For measurements in vacuum, the SP 5000 DI/F is available as a vacuum-optimized version.

use as feedback system for closed control loops is possible

The standard beam distance is 14 mm. We offer other beam distances on request.

Read application

Ideal for

long-term measurements


science / research

OEM applications

highest stability requirements

Measuring principle of the differential interferometer


Ball reflector Ø15 mm

aluminum case

with integrated magnets and screw-on

item number A033351

Environmental Correction

sensor box SB-22

temperature transducer TT-01 for air or material temperature sensor

air humidity sensor

You want to know
whether the differential interferometer – SP 5000 DI/F is the right solution for your measurement tasks?

Our SIOS experts will be happy to visit you on site. Together we can find a quick solution for your application and carry out the first test measurements in your environment.

Contact now

Related software


Software for data acquisition and visualization

Universal software for all SIOS interferometers

Basic functions for data acquisition

Synchronization settings


Software for vibration measurement

FFT analysis

Data filtering

Spectra averaging

Script control



Software library for customer software

Support and programming examples for all common programming languages

Your contact

Falko Seyfferth

Application Engineer

+49 (0) 3677 64 47-49

Are you interested in the SP 5000 DI/F?

We will be happy to make you a suitable offer.

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