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Nanopositioning and Nanomeasuring Machine


Positioning, manipulation, processing and measurement of objects and structures with nanometer accuracy

world's most precise nanopositioning and nanometrology machine

measuring and positioning range 25 x 25 x 5 mm

resolution 0.1 nm

highest accuracy 3D positioning and measuring system

probing systems, e.g. laser focus sensors, atomic force microscopes, white light sensors, 3D micro scanners

open device architecture enables application of customized sensors

the NMM-1 is controlled via PC software. User API is available.

The nanopositioning and nanomeasuring machine for three-dimensional coordinate measurement operates in a measuring range of 25 mm x 25 mm x 5 mm with a resolution of 0.1 nm. A special sensor arrangement ensures a measurement free of aberrations in all three coordinate axes. The measuring axes of three miniature interferometers intersect virtually at the point of contact between the probing sensor and the measured object.

The measured object lies directly on a movable mirror corner. The position of the mirror corner is detected by the three fixed miniature interferometers. The mirror corner is positioned with a three-axis drive system. Two angle sensors are used to measure and compensate for angular deviations during positioning.

The light from one stabilized laser is transmitted from the electronics unit to the interferometer heads via optical fibers. This results in a compact and temperature-stable design of the nanopositioning and nanomeasuring machine.

The nanomeasuring machine is the only metrological system in the world that is safely suitable for measurements of macroscopic objects with sub-nanometer accuracy under normal conditions and is in use at several national metrological institutes.

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Technical data

25 mm x 25 mm x 5 mm

<0.1 nm

Areas of application

positioning, manipulation, processing and measurement of objects of microelectronics, micromechanics, optics, microsystems technology with nanometer precision in large spatial ranges

continuous AFM scans over large areas are possible

measurement of precision parts, e.g. hardness indenters, membranes and microlenses

calibration of step height standards and pitch standards

Abbe-error-free positioning

metrological measurement setup, suitable for calibration and qualification of sensors in development

open device architecture, use of customer-specific probing sensors is possible

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Ideal for


research / development

Metrological measuring principle of the Nanomeasuring Machine NMM-1

You want to know
whether the Nanomeasuring Machine NMM-1 is the right solution for your measurement tasks?

Our SIOS experts will be happy to visit you on site. Together we can find a quick solution for your application and carry out the first test measurements in your environment.

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Related software

NMM Control

Software für die Nanopositionierung

Your contact

Falko Seyfferth

Application Engineer

+49 (0) 3677 64 47-49

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