We have developed and modified this model of the NMM-1 especially for the individual requirements of the division 5 "Precision Engineering". The nanomeasuring machine was equipped with additional interferometers for highly accurate angle control.
The latest generation of the nanopositioning and nanomeasuring machine will play an important role in the R&D work on dimensional nanometrology, together with its earlier model, which has been in operation for more than 15 years.
PTB calibration customers will also benefit from the nanomeasuring machine. In addition to the calibration of step height and grid standards with an AFM head, it is planned for the future to calibrate depth-setting and roughness standards as well as ultra-precision-turned superfine roughness standards. New types of areal roughness and other novel standards, especially those for stylus instruments, should be calibrated with different sensor heads on the new precision measuring instrument, too.
We are proud that the experts of the Physikalisch-Technische Bundesanstalt (PTB), as the national metrology institute, rely on the core competences of SIOS Meßtechnik in their choice of measuring instruments. At the same time, we would like to thank the staff of the PTB for the good cooperation.
