Highly stable differential laser interferometer with two parallel measuring beams
differential length or angle measurement of highest accuracy
minimization of environmental influences through differential measurement
thermally long-term stable sensor, temperature sensitivity < 20 nm/K
various optical reflectors can be used, e.g. spherical, plane mirror reflector
large tilt invariance of the measuring reflector
sensor head design in stainless steel as standard
beam distance: 21 mm
extensive trigger options
open interfaces for OEM software under Windows and Linux
Our ultra-stable differential laser interferometer SP 5000 DI is characterized by a unique thermal stability and is therefore preferred for long-term measurements in research and development, e.g. for the analysis of material properties.
In contrast to the standard interferometer, in the differential version the reference beam is led out of the sensor head and runs parallel to the measuring beam. This concept allows the sensor to be placed at a greater distance from the actual measurement location without significantly affecting the resolution or stability of the measurement. The length resolution of this interferometer is in the sub-nanometer range and, due to the differential principle, can be achieved at comparable measurement or beam lengths even under normal laboratory conditions.
The measurement range for the length measurement can be several meters if tilt invariant reflectors are used for the measurements. The interferometric measuring system has a modular design and can thus be adapted to the respective measuring task.
Adjustment is simple and, in particular, can be realized with long-term stability. The extension to an interferometric multi-axis system based on the SP 5000 DI interferometer allows simultaneous multi-coordinate measurements.
Areas of application
The differential laser interferometer is available as an OEM version for installation as an encoder in machine axes. For measurements in vacuum, the SP 5000 DI is available as a vacuum-optimized version.
The standard beam distance is 21 mm. We offer other beam distances on request.
Environmental Correction
sensor box SB-22
temperature transducer TT-01 for air or material temperature sensor
air humidity sensor
You would like to know
whether the differential interferometer – SP 5000 DI is the right solution for your measurement tasks?
Our SIOS experts will be happy to visit you on site. Together we can find a quick solution for your application and carry out the first test measurements in your environment.
