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Laser interferometer

SP 5000 NG

Laser interferometric measurement system for high-precision length measurements

flexible length measuring system of highest accuracy

easy handling and adjustment due to integrated beam direction detection

various optical reflectors can be used, e.g. triple mirror, spherical mirror, plane mirror reflector

permissible tilting of the measuring reflector up to ± 22.5°.

compact and robust design

sensor housing with splash water protection

design of the sensor head optionally in aluminum, stainless steel or invar

traceability to government standards

OEM versions, OEM software and vacuum version are possible

extended application range by optional interfaces

extensive trigger options

High-precision and reliable results are essential for length measurement and calibration on guides, measuring, microscope and positioning stages, coordinate measuring machines and machine tools as well as for multi-coordinate measurements. Our universal laser interferometer SP 5000 NG is the solution for your high-precision length measurement and can be completed at any time with additional components from the product family for your new measurement project.

The compact SP 5000 NG interferometer is characterized by easy handling, as well as fast and simple adjustment. It delivers highly precise measurement results in different environments and operating conditions. The alignment of the interferometer with the help of built-in sensors is simple, fast and very precise. As a result, errors caused by incorrect sensor alignment can be avoided. The precision interferometer is also available as a vacuum version.

The design of the laser interferometer is as compact as it is robust, its housing is splash-proof and the fiber cables can be sheathed to protect them from mechanical damage.

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Technical data

0 m to ≥5 m


0.15 µm/m


5 pm


Areas of application

Laser interferometric precision length measuring system for measuring, microscope and positioning stages, measuring and machine tools, hardness and material testing equipment as built-in measuring or calibration device

Multi-coordinate measurements, e.g. on planar tables

Calibration of linear encoders

Impact and runout measurements

Read application example

Ideal for


quality control

volumetric compensation


OEM applications

Measuring principle of the interferometric measuring device


Ball reflector Ø10 mm

stainless steel case

with integrated magnets

item number A043221

Ball reflector Ø15 mm

aluminum case

with integrated magnets and screw-on

item number A033351

Reflector mount with articulated ball mount

with lateral adjustment option (without reflector unit)

item number A037044

Beam deflection mirror unit 90°

for free positioning

item number A040678

90°-beam reflection

attachment to sensor head

material: aluminium

item number A034219

Articulation base

item number A034567

Environmental Correction

sensor box SB-22

temperature transducer TT-01 for air or material temperature sensor

air humidity sensor

Display model DU-04

4,5″ Display unit, including cable

item number A034568

You want to know
whether the laser interferometer – SP 5000 NG is the right solution for your measurement tasks?

Our SIOS experts will be happy to visit you on site. Together we can find a quick solution for your application and carry out the first test measurements in your environment.

Contact now

Related software


Software for data acquisition and visualization

Universal software for all SIOS interferometers

Basic functions for data acquisition

Synchronization settings


Software for vibration measurement

FFT analysis

Data filtering

Spectra averaging

Script control


Calibration software according to VDI / ISO standard

for calibration of linear axes

Acquisition of position, pitch and yaw angles and straightness


Software for the acquisition of individual measuring points

integration of measurement data into existing customer software

simple interfaces


Software for gauge block calibration

Gauge block calibration according to the standard

Customer management



Software library for customer software

Support and programming examples for all common programming languages

Your contact

Falko Seyfferth

Application Engineer

+49 (0) 3677 64 47-49

Are you interested in the SP 5000 NG?

We will be happy to make you a suitable offer.

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