Triple beam laser interferometric measuring system for simultaneous and accurate length, pitch and yaw angle measurements
flexible length measuring system of highest accuracy
easy handling and adjustment due to integrated beam direction detection
various optical reflectors can be used, e.g. spherical, plane mirror reflector
permissible tilting of the measuring reflector up to ± 12.5°
compact design
design of the sensor head optionally in aluminum, stainless steel or invar
beam distance: 12 mm
OEM versions, OEM software and vacuum version are possible
beam deflection with an optionally available adjustable deflection mirror
extended range of applications through optional interfaces
extensive trigger options
calibration software according to the currently valid standards
Many application areas in industry and research require highly precise simultaneous displacement and angle measurements. The simultaneous acquisition of the pitch and yaw angles as well as the length measurement, during the movement of the carriage on which the triple reflector unit is fixed, makes it possible to evaluate motion axis quickly and with high precision. Fast and uncomplicated sensor adjustment is particularly important here.
SP 5000 TR triple beam laser interferometers are precision length measuring instruments that combine three interferometers in one device. All three measuring channels are fed by one light source with the same highly stable laser frequency. Thus, three length values can be measured simultaneously with nanometer accuracy. From the difference between two length values and the calibrated beam distance, the corresponding angle can be determined with high resolution and high precision.
The interferometer system has a modular design and can thus be adapted to a wide variety of measurement tasks.
The fiber optic coupling of the sensor head and the optionally integrated beam direction detection support easy handling and precise adjustment.
The design of the SP 5000 TR triple beam interferometer is compact and robust. This makes it ideal for high-precision measurements in industry and research. Versions as OEM instrument also for use in vacuum are available on request.
For large measuring ranges or calibrations of large objects, the use of wireless radio temperature sensors or the LCS precision climate measuring station is recommended.
Areas of application
laser interferometric measurements on guides, measuring, microscope and positioning stages
high-precision pitch and yaw angle correction for two- or multi-coordinate measurements
calibration of measuring machines and machine tools
differential measurements (dilatometry, materials testing)
dynamic angle measurements, acquisition of angular oscillations
extension of the measuring range for angle measurement on request
Triple reflector unit
measurement range until 6 m
angle acceptance ±12.5°
base distance 12 mm
item number A039992
Triple reflector unit long-range
measurement range until 10 m
angle acceptance ±12.5°
base distance 12 mm
item number A041318
Triple reflector unit
fixing parallel with beam direction, lightweight version
measurement range until 6 m
base distance 12 mm
Reflector mount with articulated ball mount
with lateral adjustment option (without reflector unit)
item number A037044
Roll angle measurment sensor
System consists of measuring and reference sensor (2 x RAS 175 W)
measurement range until ±1°
resolution 0.2 arcsec
item number A042869 (with cable)
item number A042868 (with radio)
Environmental Correction
sensor box SB-22
temperature transducer TT-01 for air or material temperature sensor
air humidity sensor
