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Triple beam laser interferometer

SP 5000 TR

Triple beam laser interferometric measuring system for simultaneous and accurate length, pitch and yaw angle measurements

flexible length measuring system of highest accuracy

easy handling and adjustment due to integrated beam direction detection

various optical reflectors can be used, e.g. spherical, plane mirror reflector

permissible tilting of the measuring reflector up to ± 12.5°

compact design

design of the sensor head optionally in aluminum, stainless steel or invar

beam distance: 12 mm

OEM versions, OEM software and vacuum version are possible

beam deflection with an optionally available adjustable deflection mirror

extended range of applications through optional interfaces

extensive trigger options

calibration software according to the currently valid standards

Many application areas in industry and research require highly precise simultaneous displacement and angle measurements. The simultaneous acquisition of the pitch and yaw angles as well as the length measurement, during the movement of the carriage on which the triple reflector unit is fixed, makes it possible to evaluate motion axis quickly and with high precision. Fast and uncomplicated sensor adjustment is particularly important here.

SP 5000 TR triple beam laser interferometers are precision length measuring instruments that combine three interferometers in one device. All three measuring channels are fed by one light source with the same highly stable laser frequency. Thus, three length values can be measured simultaneously with nanometer accuracy. From the difference between two length values and the calibrated beam distance, the corresponding angle can be determined with high resolution and high precision.

The interferometer system has a modular design and can thus be adapted to a wide variety of measurement tasks.

The fiber optic coupling of the sensor head and the optionally integrated beam direction detection support easy handling and precise adjustment.

The design of the SP 5000 TR triple beam interferometer is compact and robust. This makes it ideal for high-precision measurements in industry and research. Versions as OEM instrument also for use in vacuum are available on request.

For large measuring ranges or calibrations of large objects, the use of wireless radio temperature sensors or the LCS precision climate measuring station is recommended.

Request advice

Technical data

0 m to ≥ 5 m

20 pm

0.15 µm/m

with reflector
±430 µrad
with plane-mirror

0.01 µrad

Areas of application

laser interferometric measurements on guides, measuring, microscope and positioning stages

high-precision pitch and yaw angle correction for two- or multi-coordinate measurements

calibration of measuring machines and machine tools

differential measurements (dilatometry, materials testing)

dynamic angle measurements, acquisition of angular oscillations

extension of the measuring range for angle measurement on request

Read application example

Ideal for

quality control 



science / research

OEM applications

Measuring principle of the triple beam interferometer


Triple reflector unit

measurement range until 6 m

angle acceptance ±12.5°

base distance 12 mm

item number A039992

Triple reflector unit long-range

measurement range until 10 m

angle acceptance ±12.5°

base distance 12 mm

item number A041318

Triple reflector unit

fixing parallel with beam direction, lightweight version

measurement range until 6 m

base distance 12 mm

Reflector mount with articulated ball mount

with lateral adjustment option (without reflector unit)

item number A037044

Beam deflection mirror unit 90°

for free positioning

item number A040678

Roll angle measurment sensor

System consists of measuring and reference sensor (2 x RAS 175 W)

measurement range until ±1°

resolution 0.2 arcsec

item number A042869 (with cable)

item number A042868 (with radio)

Adjustment table

lifting height 80 mm – max. 150 mm/ x-axial ±12.5 mm

item number A032051

Environmental Correction

sensor box SB-22

temperature transducer TT-01 for air or material temperature sensor

air humidity sensor

Display model DU-04

4,5″ Display unit, including cable

item number A034568

Related software


Software for data acquisition and visualization

Universal software for all SIOS interferometers

Basic functions for data acquisition

Synchronization settings


Software for vibration measurement

FFT analysis

Data filtering

Spectra averaging

Script control


Calibration software according to VDI / ISO standard

for calibration of linear axes

Acquisition of position, pitch and yaw angles and straightness


Fast visualization of all degrees of freedom

Synchronous acquisition of all degrees of freedom with multi-steel interferometers

Suitable for adjustment and setting of guideways


Calibration and volumetric compensation software

Calibration, error analysis and verification

Application for linear axes, CMMs and machine tools



Software library for customer software

Support and programming examples for all common programming languages

Your contact

Falko Seyfferth

Application Engineer

+49 (0) 3677 64 47-49

Are you interested in the SP 5000 TR?

We will be happy to make you a suitable offer.

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