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Calibration laser interferometer

SP 15000 C6 NG

Laser interferometer for high-precision simultaneous measurement and calibration of length, pitch angle, yaw angle, roll angle and straightness on positioning axes

flexible length measuring system of highest accuracy

highly accurate length measurements over long distances

synchronous, continuous measurements of length, pitch and yaw angles and straightness

up to 6 DoF measurements are possible in conjunction with the optional roll angle measurement sensors

easy handling and adjustment due to integrated beam direction detection

large tilt invariance of the measuring reflector

beam distance: 50 mm

horizontal and vertical straightness component measurable by swiveling optics

extensive trigger options

open interfaces for OEM software under Windows and Linux

calibration software InfasMTCAL according to the currently DIN and ISO standards

The highly accurate dynamic acquisition of guiding characteristics of machine axes as well as the subsequent standard-compliant calibration are a very labor- and time-intensive process, which ultimately leads to a high positioning accuracy.

The SP 15000 C6 Ng calibration laser interferometer was specially developed to meet the requirements of manufacturers of coordinate measuring machines and high-precision machine tools. It enables synchronous, continuous and, in conjunction with an optional roll angle sensor, 6 DoF measurements. The measured quantities length, pitch angle, yaw angle and straightness in x- and y-alignment are acquired highly accurately by laser interferometry, using the same highly stable laser frequency in all three length measurement channels.
Complete machine acceptance or volumetric compensation can be implemented using the optional software.

Due to the compact design of the straightness optics, the straightness mirror is directly attached to the sensor head. Thus, only two components have to be assembled and aligned to each other. Even in cramped or difficult-to-access spaces, the measurement system can be quickly installed and reliably adjusted.

The fiber optic coupling of the sensor head and the integrated beam direction detection support the easy handling and adjustment. The calibration interferometer does not require an additional stand. It can be placed directly on the stable machine bed. This minimizes the number of optical components to be aligned.

For large measuring ranges or calibration tasks, wireless radio temperature sensors or our precision climate measuring station LCS are preferred.

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Technical data

up to 50 m

0.2 µm/m


0.005 µrad

±4 mm over 6.5 m

10 nm

0.9 µrad

Areas of application

high-precision calibration of axes on measuring machines, machine tools and coordinate measuring machines

laser interferometric measurements on guides

high-precision simultaneous length and angle measurement

Read application example

Ideal for


quality control

volumetric compensation


Measuring principle of the calibration interferometer


Reflector unit

with 3 reflectors and straightness measurements

item number A030521

Reflector unit for SP 15000 C5 / C6 NG

for compact straightness measurement

with 4 reflectors and 90° beam reflection in one housing

item number A035245

Deflection mirror SP 15000 C

90°, adjustable

deflection possible in two directions

for beam distance: 50 mm

item number A040651

Reflector mount on permanent magnetic base

 for SP 15000 C

clamp cube and intermediate plate for column system

column, Ø25,4 mm, connecting thread: M6 (both-sided)

adapter bracket, connection thread M8

permanent magnetic base, switchable, M8

item number A035443

Roll angle measurment sensor

System consists of measuring and reference sensor (2 x RAS 175 W)

measurement range until ±1°

resolution 0.2 arcsec

item number A042869 (with cable)

item number A042868 (with radio)

Adjustment table

lifting height 80 mm – max. 150 mm/ x-axial ±12.5 mm

item number A032051

Environmental Correction

sensor box SB-22

temperature transducer TT-01 for air or material temperature sensor

air humidity sensor

Display model DU-04

4,5″ Display unit, including cable

item number A034568

You want to know whether
the calibration interferometer SP 15000 C6 NG is the right solution for your measurement tasks?

Our SIOS experts will be happy to visit you on site. Together we can find a quick solution for your application and carry out the first test measurements in your environment.

Contact now

Related software


Calibration and volumetric compensation software

Calibration, error analysis and verification

Application for linear axes, CMMs and machine tools


Calibration software according to VDI / ISO standard

for calibration of linear axes

Acquisition of position, pitch and yaw angles and straightness


Software for data acquisition and visualization

Universal software for all SIOS interferometers

Basic functions for data acquisition

Synchronization settings


Software for vibration measurement

FFT analysis

Data filtering

Spectra averaging

Script control

Your contact

Falko Seyfferth

Application Engineer

+49 (0) 3677 64 47-49

Are you interested in the SP 15000 C6 NG?

We will be happy to make you a suitable offer.

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