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Calibration laser interferometer

SP 15000 C5

Laser interferometer for high-precision simultaneous measurement and calibration of length, pitch angle, yaw angle and straightness on positioning axes

flexible length measuring system of highest accuracy

highly accurate length measurements over long distances

synchronous, continuous 5 DOF measurement of length, pitch and yaw angle, and straightness

easy handling and adjustment due to integrated beam direction detection

large tilt invariance of the measuring reflector

beam distance: 50 mm

horizontal and vertical straightness component measurable by swiveling optics

extensive trigger options

open interfaces for OEM software under Windows and Linux

calibration software according to the currently valid standards

The highly accurate dynamic acquisition of guiding characteristics of machine axes as well as the subsequent standard-compliant calibration are a very labor- and time-intensive process, which ultimately leads to a high positioning accuracy.

The SP 15000 C5 calibration laser interferometer was specially developed to meet the high demands of machine and equipment manufacturers. All measured variables such as length, pitch angle, yaw angle as well as straightness in x- and y-alignment are recorded with high precision by laser interferometry, whereby the same highly stable laser frequency is used in all three length measurement channels. This enables synchronous, continuous 5 DOF measurements. Complete machine acceptance or volumetric compensation can be implemented using the optional software.

Due to the compact design of the straightness optics, the straightness mirror is directly attached to the sensor head. Thus, only two components have to be assembled and aligned to each other. Even in cramped or difficult-to-access spaces, the measurement system can be quickly installed and reliably adjusted.

The fiber optic coupling of the sensor head and the integrated beam direction detection support the easy handling and adjustment. The calibration interferometer does not require an additional stand. It can be placed directly on the stable machine bed. This minimizes the number of optical components to be aligned.

For large measuring ranges or calibration tasks, wireless radio temperature sensors or our LCS precision climate measuring station are preferred.

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Technical data

up to 50 m

0.1 µm/m

±5°

0.0004 arcsec

±4 mm over 6.5 m

10 nm

Areas of application

high-precision calibration of axes on measuring machines, machine tools and coordinate measuring machines

laser interferometric measurements on guides

high-precision simultaneous length and angle measurement

Read application example

Ideal for

calibration

quality control

volumetric compensation

development

Measuring principle of the calibration interferometer

Accessories

Reflector unit

with 3 reflectors and straightness measurements

item number A030521

You want to know
whether the calibration interferometer SP 15000 C5 is the right solution for your measurement tasks?

 
Our SIOS experts will be happy to visit you on site. Together we can find a quick solution for your application and carry out the first test measurements in your environment.

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Related software

InfasMTCAL

Calibration and volumetric compensation software

Calibration, error analysis and verification

Application for linear axes, CMMs and machine tools

InfasAXIS

Calibration software according to VDI / ISO standard

for calibration of linear axes

Acquisition of position, pitch and yaw angles and straightness

InfasNTC

Software for data acquisition and visualization

Universal software for all SIOS interferometers

Basic functions for data acquisition

Synchronization settings

InfasVIBRO

Software for vibration measurement

FFT analysis

Data filtering

Spectra averaging

Script control

Your contact

Peter Grundschok

Sales Manager
Sales worldwide

+49 (0) 3677-64 47-33

p.grundschok@sios.de

Are you interested in the SP 15000 C5?

We will be happy to make you a suitable offer.

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