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High precision measurement systems

Optical and tactile measurement technology for ultra-precise measurements down to the picometer range.

SIOS offers a wide range of precision measuring systems and laser interferometric measuring devices. Discover below our product portfolio for the measurement of length, angle, vibration, straightness, temperature, force and other measurands with highest resolution and low measurement uncertainty.

Our high-precision measurement systems are used in nanometrology, mechanical engineering, optics and semiconductor industry, calibration, quality control, materials management, medical technology and geoscience as well as research and development in industrial and scientific fields.


Science and industry trust the highly accurate precision measurement systems of SIOS - WORLDWIDE.

 

Quick finder to the right measuring system

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Length measurement systems

modulare Laserinterferometer

Laser interferometer

SP 5000 NG

displacement measurement up to 5 m

Product details

Long-Range laser interferometer

SP 15000 NG

for highly accurate length measurements over long distances (long range measurements)

Product details

Differential laser interferometer

SP 5000 DI

ultra-stable and high-resolution long-term measurement

Product details

Differential laser interferometer

SP 5000 DI/F

as feedback system

Installation system for real-time data output

Product details

Length and Angle Measurement Systems

Multibeam laser interferometer

Triple beam laser interferometer

SP 5000 TR

simultaneous displacement and two angle measurement

Product details

Calibration laser interferometer

SP 15000 C5

5 DOF calibration of axes and linear guides

Product details

Differential laser interferometer

SP 5000 DI

ultra-stable and high-resolution long-term measurement

Product details

Calibration systems

Laser interferometer for calibration

Laser interferometer

SP 5000 NG

displacement measurement up to 5 m

Product details

Triple beam laser interferometer

SP 5000 TR

simultaneous displacement and two angle measurement

Product details

Calibration laser interferometer

SP 15000 C5

5 DOF calibration of axes and linear guides

Product details

Vibration measurement systems

Laser vibrometer for non-contact vibration measurement

Vibrometer with fixed focal length

LSV 120 NG

high-resolution vibration measurement with fixed working distance up to 5 mHz

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Vibrometer with exchangeable lens attachment

LSV 120 NG

high-resolution vibration measurement with exchangeable lens attachment

Product details

Vibrometer with variable focal length

LSV 2500 NG

variable working distance from 240 mm to 2500 mm

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Nano Vibration Analyzer

NA

vibration analysis on small objects

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Gauging Probe

Tactile length and thickness measurement

High linearity probe

LM 20/50

motor driven

with adjustable probing force

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Gauge Block Calibration System

EPP

for gauge blocks up to 100 mm length incl. calibration software

Product details

Nanopositioning

Nanopositioning, surface metrology, 3D measurements

Nanopositioning and Nanomeasuring Machine

NMM-1

highest accuracy nanopositioning and measuring system

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Nanopositioning Platform

NPP-1

scalable nanopositioning platform

Nanometrology for large objects

Product details

Measurement and Calibration systems

Measuring devices for complete solutions

Gauge Block Calibration System

EPP

for gauge blocks up to 100 mm length incl. calibration software

Product details

Nanopositioning and Nanomeasuring Machine

NMM-1

highest accuracy nanopositioning and measuring system

Product details

Testing Rig for Applanation Tonometers

PT

automated calibration of applanation tonometers

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Stabilized HeNe Lasers

Frequency standards

Precision Climate Measuring Station

Temperature, pressure and humidity measurements

Precision Climate Measuring Station

LCS

multi-channel temperature measurement

wireless measurements

precise calibration

Product details

Customized solution for your measurement tasks

 
SIOS offers you a wide range of standard products in high-precision premium quality. However, if you have not found exactly the right measuring system for your application at this point, simply use our OEM service. Together with you, our experts will find a customized solution.

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Measurement Software

Software solutions for your application

InfasNTC

Software for data acquisition and visualization

Universal software for all SIOS interferometers

Basic functions for data acquisition

Synchronization settings

InfasVIBRO

Software for vibration measurement

FFT analysis

Data filtering

Spectra averaging

Script control

InfasAXIS

Calibration software according to VDI / ISO standard

for calibration of linear axes

Acquisition of position, pitch and yaw angles and straightness

InfasALIGN

Fast visualization of all degrees of freedom

Synchronous acquisition of all degrees of freedom with multi-steel interferometers

Suitable for adjustment and setting of guideways

InfasMTCAL

Calibration and volumetric compensation software

Calibration, error analysis and verification

Application for linear axes, CMMs and machine tools

InfasPOINT

Software for the acquisition of individual measuring points

integration of measurement data into existing customer software

simple interfaces

InfasLM

Software for probes

simple thickness measurements

probe control and measurement data acquisition

InfasTONO

Software for tonometers

Calibration of tonometer testers according to the standard

Documentation of measurement results

InfasGAUGE

Software for gauge block calibration

Gauge block calibration according to the standard

Customer management

API

SIOS-API

Software library for customer software

Support and programming examples for all common programming languages

NMM Control

Software für die Nanopositionierung